Versum Materials Crystalline and Thin Film PV Manufacturing Materials

View All Versum Materials Products

Product Name Description/Benefits

Boron TriBromide (BBr3)

Phosphorus Oxychloride (POCl3)

Phosphorus Oxychloride (POCl3) is a liquid Phosphorus used for diffusion of N-type regions into silicon substrates, for use in semiconductor and photovoltaic process applications.

Trans-LC® (Trans 1,2-Dichloroethylene)

EXTREMA® Trans 1,2-Dichloroethylene (Trans-LC®), a Schumacher® product, is an ozone-safe liquid chlorine source for use in silicon oxidation and tube cleaning.  It features a low toxic hazard rating and is not restricted as an ozone depleting chemical.  Trans-LC provides consistent process results and is superior in performance to corrosive HCl.  The use of Trans-LC is preferred over any known chlorine sources in the low temperature range below 800oC.

For more information, please Contact Us.

Versum Materials Website