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| Product Name | Description/Benefits |
|---|---|
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Boron TriBromide (BBr3) |
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Phosphorus Oxychloride (POCl3) |
Phosphorus Oxychloride (POCl3) is a liquid Phosphorus used for diffusion of N-type regions into silicon substrates, for use in semiconductor and photovoltaic process applications. |
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Trans-LC® (Trans 1,2-Dichloroethylene) |
EXTREMA® Trans 1,2-Dichloroethylene (Trans-LC®), a Schumacher® product, is an ozone-safe liquid chlorine source for use in silicon oxidation and tube cleaning. It features a low toxic hazard rating and is not restricted as an ozone depleting chemical. Trans-LC provides consistent process results and is superior in performance to corrosive HCl. The use of Trans-LC is preferred over any known chlorine sources in the low temperature range below 800oC. |
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