Versum Materials Post CMP Cleaning Chemicals

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Product Name Description/Benefits

CoppeReady® BTA-02NB

CopperReady BTA-02NB is 0.02% of Benzotriazole solution that functions as a corrosion inhibitor for CMP processes.

CopperReady® BTA-1NB

CoppeReady BTA-1NB is 1% of Benzotriazole solution that functions as a corrosion inhibitor for CMP processes.

CopperReady® CP72B

CoppeReady® CP72B is part of our CoppeReady series of application-specific products (cleaners, surface conditioners,and pad cleaners) that are designed to reduce the customer’s overall cost of ownership while providing leading edge cleaning performance.  CoppeReady CP72B was engineered specifically to remove trace metals, organics and particle contaminants from copper, tantalum/tantalum nitride and hydrophobic low-k surfaces. 

CopperReady® CP98-D

CoppeReady® CP98-D is part of our CoppeReady series of application-specific products (cleaners, surface conditioners and pad cleaners) that are used to reduce the customer’s overall cost of ownership while providing leading edge cleaning performance.  CoppeReady CP98-D is designed specifically for use in advanced Co, Mn and Ru barriers, but is also compatible with all standard barrier metals in use today.

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