ULTRA-i 123 is an advanced, general purpose, 250nm critical i-Line with extendibility to 230nm and below.
Softbake: 85°C/90sec Proximity
PEB: 120°C/90sec Proximity
Develop: MF-CD24A or 26A 21°C 45sec single puddle
Softbake: 90°C/90sec Proximity
PEB: 110°C/90sec Proximity
Develop: MF-24A or 26A 21°C 60sec single puddle