Dow® MICROPOSIT™ EBR™-10A Edge Bead Remover

Dow® Electronic Materials MICROPOSIT™ EBR-10A Edge Bead Remover is a PGMEA based solvent, which is used to eliminate the photoresist and anti-reflectant edge bead that occurs during typical spin coat wafer processing.

Advantages Include:
  • Toxicologically safter alternative to ethylene glycol-derived ether acetates
  • Compatible with all MICROPOSIT and MEGAPOSIT photoresists
  • Efficient and expedient removal of edge bead
  • Improved yield due to defect reduction