Dow® Electronic Materials MICROPOSIT™ EBR-10A Edge Bead Remover is a PGMEA based solvent, which is used to eliminate the photoresist and anti-reflectant edge bead that occurs during typical spin coat wafer processing.
- Toxicologically safter alternative to ethylene glycol-derived ether acetates
- Compatible with all MICROPOSIT and MEGAPOSIT photoresists
- Efficient and expedient removal of edge bead
- Improved yield due to defect reduction